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2005 Nuggets

Mold Replication nanofabrication
(Theresa Mayer and Susan Trolier-McKinstry, IRG1)

Mold replication has been used to make high aspect ratio structures in complex materials. Macroporous silicon was infiltrated with a sol-gel solution of LaNiO3 (See Fig. 1), a metallically conducting perovskite which is an excellent barrier layer between Si and a host of lead-based perovskites. Sequential depositions of LaNiO3/PZT/(LaNiO3 or Si) heterostructures for electrical measurements are underway to enable electrical characterization, and ultimately devices such as high sensitivity, high frequency biomedical ultrasound. Procedures to assemble and integrate nanotubes and nanowires are already in-place. Individual nanowires can be integrated between pairs of lithographically defined electrodes. Top contacts can be added via lithography. In addition, arrays of nanomechanical structures can be suspended (Fig. 2). The procedure involves fluidic nanowire assembly followed by electrodeposition of sidewall anchors to form fixed-fixed or fixed-free cantilevers.